Welcome to NanoFab.SDSU, a brand-new leading center for micro and nanofabrication located in the EIS building of SDSU. The state-of-the-art facility has a 2500 sq. ft. ISO 9001-certified Class 1000 Cleanroom with 4” and 6” wafer processing capability with 0.2 micron lithography feature sizes. The Center provides a comprehensive and expanding selection of state-of-the-art process equipment for lithography, etching, thermal processing, thin-film deposition, and characterization. The vision of the Center is to become a leading national and international center of integrated silicon and polymer/carbon-based micro and nanofabrication facility to support user needs in newer areas of nanoscale science, engineering, and technology domains. The Center has a strong focus on educating undergraduate, masters and doctoral students in the various areas of nanotechnology.

Equipment & Facilities

1. ABM, High Resolution Mask Alignment and Exposure System (0.2 micron resolution)
2. PECVD & Pyrolysis Split-Tube Furnace with Vacuum
3. Nordiko Metal Deposition System. Co-deposition of up to 4 metals.
4. Technics Series 85 DRIE and Plasma Etcher
5. OAI UV Light Source
6. Brewer Spin-coater
7. ETS-150 Thermal Evaporation + Sputtering
8. High-temperature ovens
9. Signatone Probe Station and 4-Point Probe
10. Filmetrics F40-PAR Profilometer
11. Hirox 3D Microscope
12. Newport Solar Simulator with Oriel I-V Station