Industrial Consortium and Research Center


WELCOME TO NANOFAB.SDSU

Welcome to NanoFab.SDSU, a brand-new leading center for micro and nanofabrication located in the EIS building of SDSU. The state-of-the-art facility has a 2500 sq. ft. ISO 9001-certified Class 1000 Cleanroom with 4” and 6” wafer processing capability with 0.2 micron lithography feature sizes. The Center provides a comprehensive and expanding selection of state-of-the-art process equipment for lithography, etching, thermal processing, thin-film deposition, and characterization. The vision of the Center is to become a leading national and international center of integrated silicon and polymer/carbon-based micro and nanofabrication facility to support user needs in newer areas of nanoscale science, engineering, and technology domains. The Center has a strong focus on educating undergraduate, masters and doctoral students in the various areas of nanotechnology.

Equipment & Facilities

  1. ABM, High Resolution Mask Alignment and Exposure System (0.2 micron resolution)
  2. PECVD & Pyrolysis Split-Tube Furnace with Vacuum
  3. Nordiko Metal Deposition System. Co-deposition of up to 4 metals.
  4. Technics Series 85 DRIE and Plasma Etcher
  5. OAI UV Light Source
  6. Brewer Spin-coater
  7. ETS-150 Thermal Evaporation + Sputtering
  8. High-temperature ovens
  9. Signatone Probe Station and 4-Point Probe
  10. Filmetrics F40-PAR Profilometer
  11. Hirox 3D Microscope
  12. Newport Solar Simulator with Oriel I-V Station

Management

Director of Center
Professor Sam Kassegne
kassegne@sdsu.edu

Capabilities

  1. CVD/PECVD for Dielectric Materials
  2. DRIE
  3. Wet and Dry Oxide Growth
  4. Thin-film Metal Deposition (Au, Pt, Cr, Ti, Ni, Cu)
  5. Graphene, Glassy Carbon, CNT
  6. Acid (Wet) Etching
  7. Pyrolysis
  8. SEM and 3D Microscopy

SERVICES

Major Achievements

  1. Several patents and disclosures in MEMS IMU, organic solar cells, neural probes, and graphene processes.
  2. Incubated start-ups and licensed variety of technology
  3. Unique strength in integrating carbon, polymer, and silicon-based microfabrication.
  4. First to introduce single and double-sided pattern transfer technology for carbon microelectrodes on polymer substrates
  5. Hosted CMEMS 2018 Conference.
  6. Training next generation of workforce and researchers (alumni work in Apple, Intel, Qualcomm, ASML and several start-ups).
  7. Funded by NSF, DoE, DoD and Industry

Offering Services To:

Industry

  1. TumorGen MDx (microfluidics chips)
  2. TissueNetix (microfluidics chips)
  3. Grapheton

Research Labs

  1. University of Washington (CSNE) – (cortical and spinal neural probes)
  2. University of Texas at Dallas
  3. Physikalisch-Technische Bundesanstalt (PTB) Braunschweig, Berlin, Germany
  4. University of Ferrara – (ECoG Neural Probes, 12, 32, and 64-channels)
  5. University of Indonesia
  6. Yonezawa University (Japan)
  7. SPAWAR, SSC-Pacific, US Navy

MEMBERSHIP

Advantages of Membership

  1. Direct access to highly-trained students
  2. Interaction with leading researchers
  3. State-of-the-art equipment and processes
  4. Participate in annual Industry Day
  5. Reduced rate for members
  6. Simple paperwork
  7. No institutional barriers
  8. Your IP is protected
  9. Opportunity to license IP from consortium labs.

PORTFOLIO

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CONTACT


  • Sam Kassegne, PhD, PE

    Professor of Mechanical Engineering,
    Deputy Director, NSF Center for Sensorimotor Neural Engineering
    Department of Mechanical Engineering
    San Diego State University
    5500 Campanile Drive, EIS - 214
    San Diego, CA 92182, USA 

    kassegne at sdsu dot edu